| 000 | 00358nam a2200133Ia 4500 | ||
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| 005 | 20240713151237.0 | ||
| 008 | 240712s9999 xx 000 0 und d | ||
| 020 | _a9788122428339 | ||
| 041 | _aeng | ||
| 100 | _aMotamedi, m.e.ed. | ||
| 245 | _aMoems; micro-opto-electro-mechanieal systems | ||
| 260 |
_aNew Delhi _b New age int (p) ltd. _c2010 |
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| 300 | _a614 | ||
| 999 |
_c33958 _d33958 |
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